Coating device and coating method

According to one embodiment, a coating apparatus includes a first tube, a first pump, first and second nozzles, and a holding portion. The first pipe includes a first inlet, a first outlet, and a second outlet. The first pump can supply liquid to the first inlet. The first nozzle includes a first no...

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Bibliographic Details
Main Authors SAITA YUTAKA, NAITO KATSUYUKI, NARA KOHEI, KOKUBO, TAKAHIRO, HIRASAWA HIROAKI, SHIDA NAOMI
Format Patent
LanguageChinese
English
Published 08.04.2022
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Summary:According to one embodiment, a coating apparatus includes a first tube, a first pump, first and second nozzles, and a holding portion. The first pipe includes a first inlet, a first outlet, and a second outlet. The first pump can supply liquid to the first inlet. The first nozzle includes a first nozzle inlet and a first nozzle outlet. The first nozzle inlet is connected to the first outlet. The first nozzle discharge port can discharge the liquid passing through the first tube. The second nozzle includes a second nozzle inlet and a second nozzle outlet. The second nozzle inlet is connected to the second outlet. The second nozzle discharge port can discharge the liquid passing through the first tube. The holding unit holds the first and second nozzles. The holding part can form a first state and a second state. In the first state, the height of the first nozzle discharge port and the height of the second nozzle discharge port are greater than the height of the first pipe. In the second state, the height of th
Bibliography:Application Number: CN202080058863