Array substrate, manufacturing method thereof and display panel

• Main Authors: HEO CHEOL-HO, SUN SONG, HONG WENJIN, XIONG QIN, LU JINGSONG
• Format: Patent
• Language: Chinese; English
• Published: 08.04.2022
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

The invention is suitable for the technical field of display, and provides an array substrate which comprises a substrate body, scanning lines and signal lines arranged on the substrate body, and thin film transistors arranged at the intersections of the scanning lines and the signal lines. At least one of the scanning line and the signal line comprises a first metal layer and a first upper molybdenum nitride layer stacked on the first metal layer. The invention further provides a manufacturing method of the array substrate and a display panel. At least one of the scanning line and the signal line in the array substrate comprises the first metal layer and the first upper molybdenum nitride layer arranged on the first metal layer, so that the thickness of the first metal layer can be increased, the line resistance of the scanning line and/or the signal line can be reduced, and the requirements of high-order products can be met. 本申请适用于显示技术领域，提出了一种阵列基板，包括衬底基板、设于衬底基板上的扫描线和信号线，以及设于扫描线和信号线交叉处的薄膜晶体管，扫描线和信号线中的至少一者包括第