Runway type micro-ring optical switch based on silicon dioxide/polymer mixed waveguide and preparation method of runway type micro-ring optical switch

• Main Authors: LI YUE, YIN YUEXIN, ZHANG DAMING, LYU XINYU, YAO MENGKE, XU XINRU, DING YINGZHI
• Format: Patent
• Language: Chinese; English
• Published: 08.04.2022
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

The invention discloses a silicon dioxide/polymer mixed waveguide-based runway type micro-ring optical switch and a preparation method thereof, and belongs to the technical field of silicon dioxide/polymer mixed waveguide optical integrated chip preparation. The structure is composed of a Si substrate, a SiO2 lower cladding layer, a polymer core layer, a polymer upper cladding layer and a metal electrode from bottom to top. The polymer core layer is composed of a micro-ring resonance part and a coupling part; the micro-ring resonance part is formed by sequentially connecting a first bent waveguide, a first straight waveguide, a second bent waveguide and a second straight waveguide to form a runway type structure; the coupling part is composed of an input straight waveguide, a third straight waveguide and an output straight waveguide, and the second straight waveguide and the third straight waveguide form a directional coupler; by applying modulation voltage to the metal electrode, the function of the optical