Position adjustment amount monitoring device

• Main Authors: QIU DAYI, YIN YANCHAO, LIU ZHEN, WU FENGLI
• Format: Patent
• Language: Chinese; English
• Published: 25.03.2022
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention provides a position adjustment amount monitoring device, which is used for detecting the horizontal position of a heating disc in semiconductor equipment, and comprises a detector plate which is provided with a hole used for accommodating a connecting rod between the heating disc and a heating disc mounting seat; the displacement detectors are arranged at intervals in the circumferential direction with the center of the hole as the center, and detection heads of the displacement detectors abut against the surface of the heating disc installation base; the connecting piece is fixedly connected with the detector plate and used for installing the detector plate on the semiconductor equipment, the detector plate provided with the displacement detector is installed outside a process cavity of the semiconductor equipment through the connecting piece, and the position of the heating disc can be monitored while the process is carried out; the steps of associating the process effect with the position adj