TRANSFER DEVICE AND FILM FORMING APPARATUS USING SAME

• Main Authors: AOYAMA TAKAAKI, DAIGO YOSHIKI
• Format: Patent
• Language: Chinese; English
• Published: 04.03.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

In order to provide a compact and inexpensive film-forming device capable of ensuring stability of film-forming quality and having high productivity, the film-forming device is provided with: a rotatable rotating body (21) in which a holding section (212) is provided along the outer peripheral section of the rotating body (21), and an object (3) to be transferred is detachably held by the holding section (212); and a transfer mechanism (22) having a gripping mechanism (223) capable of gripping and releasing the object (3), a holding unit (212) for transferring the object (3) held by a predetermined device (111) to the rotating body (21), and another object (3) held by the rotating body (21) to the predetermined device (111). 为了提供一种可确保成膜品质的稳定性、生产率高、小型且廉价的成膜装置，其具备：旋转体(21)，其为能够旋转的旋转体(21)，沿着该旋转体(21)的外周部设置有保持部(212)，应移载的对象物(3)以能够装卸的方式保持于该保持部(212)；以及移载机构(22)，其具有能够把持以及释放上述对象物(3)的把持机构(223)，将保持于规定设备(111)的对象物(3)移载到上述旋转体(21)的保持部(212)，并且将保持于上述旋转体(21)的其他对象物(3)移载到上述规定设备(111)。