MEMS microphone protection structure and MEMS microphone array structure

• Main Authors: LI XIAOPING, ZOU HAISHAN, ZHANG LINKE, CAI XUAN, ZHAN XUELEI
• Format: Patent
• Language: Chinese; English
• Published: 01.03.2022
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; PUBLIC ADDRESS SYSTEMS

The invention provides an MEMS microphone protection structure and an MEMS microphone array structure. The MEMS microphone protection structure comprises a dustproof film, an outer shell, a base and MEMS microphones, and the outer shell and the base are connected to form an inner cavity; a sound hole for sound penetration is formed in the outer shell; a dustproof film is arranged below the sound hole; the MEMS microphone is mounted on the base; and the dustproof film and the MEMS microphone are packaged in the inner cavity by the outer shell and the base to form the MEMS microphone protection structure. According to the invention, the dustproof effect can be realized in a small space, the influence of dust on the MEMS microphone is weakened, the dustproof cost is reduced, and the service life of the MEMS microphone is prolonged. 本发明提供一种MEMS麦克风防护结构及MEMS麦克风阵列结构，MEMS麦克风防护结构包括防尘薄膜、外壳体、底座、MEMS麦克风，所述外壳体和底座连接形成内腔；所述外壳体上开设有用于声音穿透的声孔；所述声孔的下方设有防尘薄膜；所述MEMS麦克风安装在底座上；所述外壳体和底座将防尘薄膜和MEMS麦克风封装在内腔内部形成MEMS麦克风防护结构。本发明能够在较小的空间内实