Graphene surface acoustic wave filter device and preparation method thereof

The invention discloses a graphene surface acoustic wave filter device and a preparation method thereof. The graphene surface acoustic wave filter device comprises a piezoelectric substrate, a catalytic metal electrode layer and a graphene layer, wherein the piezoelectric substrate, the catalytic me...

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Main Authors ZHANG QI, PENG JUNPING, GUO YANRUI, LI PEISEN, HU YUEGUO, QIU WEICHENG, PAN MENGCHUN, HU JIAFEI
Format Patent
LanguageChinese
English
Published 25.02.2022
Subjects
BASIC ELECTRONIC CIRCUITRY
CHEMISTRY
COMPOUNDS THEREOF
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
RESONATORS
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Summary:The invention discloses a graphene surface acoustic wave filter device and a preparation method thereof. The graphene surface acoustic wave filter device comprises a piezoelectric substrate, a catalytic metal electrode layer and a graphene layer, wherein the piezoelectric substrate, the catalytic metal electrode layer and the graphene layer are sequentially arranged from bottom to top, and the graphene layer and the catalytic metal electrode layer jointly form a graphene interdigital electrode. The preparation method comprises the following steps: (1) cleaning the piezoelectric substrate; (2) preparing the catalytic metal electrode layer on the piezoelectric substrate in a graphical manner; and (3) growing graphene on the catalytic metal electrode layer to form the graphene interdigital electrode. According to the invention, the graphene/metal layer is prepared by adopting the method of combining chemical vapor deposition and metal layer catalytic cracking, so that thickness of the catalytic metal electrode l
Bibliography:Application Number: CN202111417968