Organic-inorganic hybrid integrated variable optical attenuator and preparation method thereof

• Main Authors: YIN YUEXIN, ZHANG DAMING, LYU XINYU, YAO MENGKE, DING YINGZHI, XU XINRU, LIANG JIAQI
• Format: Patent
• Language: Chinese; English
• Published: 25.02.2022
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

The invention discloses an organic-inorganic hybrid integrated variable optical attenuator and a preparation method thereof, and belongs to the technical field of planar optical waveguide devices and preparation thereof. The organic-inorganic hybrid integrated variable optical attenuator is composed of a silicon substrate, a silicon dioxide lower cladding layer, a germanium-doped silicon dioxide input waveguide and a germanium-doped silicon dioxide output waveguide which are of strip-shaped structures, an interlayer converter based on a vertical MMI structure, a boron and phosphorus-doped silicon dioxide upper cladding layer, a 1 * 1 Mach-Zehnder thermo-optical switch, a polymer upper cladding layer and a heating electrode, wherein the refractive indexes of the input waveguide and the output waveguide are larger than the refractive index of the silicon dioxide upper cladding. The vertical MMI is compact in structure, a VOA device of a traditional inorganic PLC is replaced with a polymer thermo-optical switch