Solar cell and preparation method thereof

• Main Authors: JIANG XIULIN, CHEN BIN, DUAN GUANGLIANG
• Format: Patent
• Language: Chinese; English
• Published: 01.02.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention discloses a solar cell and a preparation method of the solar cell. The preparation method of the solar cell comprises the following steps: sequentially forming a tunneling silicon oxide layer, an N-type doped polycrystalline silicon layer and a back passivation anti-reflection film on the back surface of an N-type silicon substrate; grooving the back passivation anti-reflection film, and forming a nickel metal layer in a grooving area; printing a back fine gate electrode on the nickel metal layer, printing a back main gate electrode on the back passivation anti-reflection film, and electrically connecting the back fine gate electrode with the back main gate electrode. According to the preparation method, the binding force between the metal gate line and silicon can be ensured, meanwhile, the damage of the slurry to the thin polycrystalline silicon layer in the using process is avoided, the passivation effect of the passivation contact structure is ensured, the manufacturing cost of the solar cel