HOUSING AND HANDLING METHOD FOR PROCESSING DEVICE

• Main Authors: SHIGEHARA YOSHINAO, SHIONO YUKIO, WAKISAKA TAISEI, HIRAYAMA KATSUHIRO
• Format: Patent
• Language: Chinese; English
• Published: 18.01.2022
• Subjects: ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS; MEASURING; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR; PHYSICS; TARIFF METERING APPARATUS; TESTING

Provided are a housing and a handling method for a processing device that can prevent the adherence of dust particles and the like on a sensor. A housing (18) accomodates a sensor (20) that detects an energy beam (42). The housing comprises: a chamber (18A) provided with a transparent member (24) through which the energy beam can pass; and a supply port (18B) for supplying gas into the chamber. The sensor detects an energy beam incident thereon via the transparent member. 提供一种能够抑制粉尘等附着于传感器的壳体和加工装置的使用方法。壳体(18)用于收容对能量射束(42)进行检测的传感器(20)，具有腔室(18A)和供给口(18B)，其中，所述腔室(18A)具有能够使能量射束透过的透过性部件(24)；所述供给口(18B)用于向腔室内供给气体，传感器对经由透过性部件射入的能量射束进行检测。