ELECTROSTATIC ACTUATOR HAVING MULTILAYER STRUCTURE

• Main Authors: SANEYOSHI KEIJI, ITO MAKOTO, IZUMITANI HIKARU
• Format: Patent
• Language: Chinese; English
• Published: 07.01.2022
• Subjects: CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; LAYERED PRODUCTS; LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM; PERFORMING OPERATIONS; TRANSPORTING

Provided is a stacked-type electrostatic actuator in which the insulation performance between conductive layers is maintained even when an elastic layer is deformed by the creep phenomenon. This electrostatic actuator has a structure in which multiple electrode films are stacked and bonded, wherein each electrode film has a five-layer structure composed of an elastic layer, an insulating layer, a conductive layer, an insulating layer, and an elastic layer, and the material composing the elastic layer has a Young's modulus that is smaller than the Young's modulus of the material composing the insulating layer, alternatively, the material composing the elastic layer has a spring constant that increases as the electrode film extends in the stacking direction. 本发明提供一种即使弹性层由于蠕变现象而变形，也能维持导体层间的绝缘性能的层叠型静电致动器。静电致动器具有将多个电极膜层叠结合的构造，各电极膜具有弹性层、绝缘层、导体层、绝缘层、弹性层的5层构造，构成弹性层的材料的杨氏模量比构成绝缘层的材料的杨氏模量小，或者构成弹性层的材料的弹簧常数伴随着电极膜在层叠方向上伸长而增加。