Remote plasma source vacuum cavity

• Main Authors: ZHANG DECAI, HONG JINGWEI
• Format: Patent
• Language: Chinese; English
• Published: 04.01.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

The invention discloses a remote plasma source vacuum cavity, and relates to the technical field of plasma source vacuum cavities. The remote plasma source vacuum cavity a regular N-polygon main body, an air inlet end, an air outlet end and a magnetic core, wherein a regular N-polygon opening is formed in the middle of the regular N-polygon main body and the whole regular N-polygon main body is annular; the regular N-polygon body is formed by splicing a plurality of connecting blocks, the adjacent connecting blocks are connected in a sealed mode through sealing rings, cavities are formed in the connecting blocks, and all the connecting blocks are connected to form a communicated integral cavity. The air inlet end and the air outlet end are symmetrically mounted on the regular N-polygon main body front and back, an air inlet and an air outlet which are communicated with the integral cavity are respectively formed in the air inlet end and the air outlet end, and an ignition opening communicated with the air inl