MEMS switch for optical coupling

• Main Authors: KRISHNAMOORTHY UMA, YU STEVE YUNGMING, SCHULTZ TIMOTHY JOHN, WANG NING, GRAY YAMA, PETERS CHRISTIAN, ROCZNIK THOMAS
• Format: Patent
• Language: Chinese; English
• Published: 04.01.2022
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

Disclosed is an MEMS switch for optical coupling. An optical switch includes: a bus waveguide supported by a substrate, an optical antenna along a plane, an optical antenna coupled to the substrate via a spring along the line, a reactive electrode suspended adjacent to the coupling waveguide, and an actuation electrode supported by the substrate. When the opposite polarity voltage difference between the actuation electrode and the reaction electrode is less than the lower threshold, the angle between the plane and the substrate is greater than 10 degrees, and when the opposite polarity voltage difference between the actuation electrode and the reaction electrode is greater than the upper threshold, the plane is parallel to the substrate. 用于光耦合的MEMS开关。一种光开关包括：由基板支撑的总线波导、沿着平面定向的光学天线、沿着线经由弹簧与基板耦合的光学天线、与耦合波导相邻悬挂的反应电极、以及由基板支撑的致动电极。当致动电极与反应电极之间的相反极性电压差小于下阈值时，该平面与基板的角度大于10度，并且当致动电极与反应电极之间的相反极性电压差大于上阈值时，该平面与基板平行。