STACKED ELECTROSTATIC ACTUATOR

• Main Authors: SANEYOSHI KEIJI, ITO MAKOTO, IZUMITANI HIKARU
• Format: Patent
• Language: Chinese; English
• Published: 31.12.2021
• Subjects: CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION

Provided is a stacked electrostatic actuator which exhibits sufficient contractile force even when pulled by a large external force and which has a contraction coefficient that does not decrease during a light load. The stacked electrostatic actuator comprises a plurality of electrode films having a three-layer structure of a first insulating layer, a conductive layer, and a second insulating layer, wherein each electrode film includes, on the first insulating layer of the electrode film, connecting regions P that are surface-treated so as to be able to be connected to another electrode film, and non-connecting regions Q which cannot be connected to other electrode films. Boundaries C between the connecting regions P and the non-connecting regions Q have a wave-like pattern which can be defined using at least one radius of curvature of finite values. The electrode films are stacked such that the connecting regions P of a first electrode film do not overlap, in the stacking direction, with the connecting regio