REACTOR FOR COATING PARTICLES IN STATIONARY CHAMBER WITH ROTATING PADDLES AND GAS INJECTION

• Main Authors: NARWANKAR PRAVIN K, DESAI GOVINDRAJ, KRISHNASAMY SEKAR, FRANKEL JONATHAN, DESAI SANDIP S, NEIKIRK COLIN C, TRUONG QUOC
• Format: Patent
• Language: Chinese; English
• Published: 17.12.2021
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

A reactor for coating particles includes a stationary vacuum chamber having a lower portion that forms a half-cylinder and an upper portion to hold a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, a motor to rotate a drive shaft of the paddle assembly, a chemical delivery system to deliver a first fluid, and a first gas injection assembly to receive the first fluid from the chemical delivery system and having apertures configured to inject a first reactant or precursor gas into the lower portion of the chamber and such that the first reactant or precursor gas flows substantially tangent to a 10 curved inner surface of the half-cylinder. 一种涂覆粒子的反应器，包括：用于保持待涂覆粒子的床的固定的真空腔室，固定的真空腔室具有形成半圆柱体的下部和上部；位于腔室的上部中的真空端口；叶片组件；用于使叶片组件的驱动轴旋转的电机；用于输送第一流体的化学物质输送系统；以及第一气体注入组件，第一气体注入组件用于从化学物质输送系统接收第一流体，并且具有孔，孔被配置为将第一反应物或前驱物气体注入腔室的下部，并使得第一反应物或前驱物气体实质上与半圆柱体的弯曲内表面相切地流动。