Heterojunction solar cell with buffer protection film and preparation method thereof

• Main Authors: LI XIANFENG, XIA SHENJIANG, LIU YUNNAN, QIU HONG, QIAN BAODUO, ZHANG SHANSHAN
• Format: Patent
• Language: Chinese; English
• Published: 10.12.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention discloses a heterojunction solar cell with a buffer protection film and a preparation method thereof; the heterojunction solar cell comprises a crystalline silicon substrate (1), amorphous silicon intrinsic layers (2) are deposited on the front face and the back face of the crystalline silicon substrate (1) respectively, N type doped amorphous silicon layers and P type doped amorphous silicon layers are deposited on the outer sides of the amorphous silicon intrinsic layers respectively. A buffer protection transparent conductive film (5) is deposited on the outer side of each P type doped amorphous silicon layer (4), a transparent conductive layer (6) is deposited on the outer side of a buffer protection transparent conductive film and the outer side of each N type doped amorphous silicon layer (3), and a metal electrode (7) is arranged on the outer side of the transparent conductive layer. The preparation method comprises the following steps: depositing the buffer protection transparent conduct