NORMAL INCIDENCE PHASE-SHIFTED DEFLECTOMETRY SENSOR, SYSTEM, AND METHOD FOR INSPECTING A SURFACE OF A SPECIMEN

• Main Authors: NATHANIEL ROISEN, SCHILTZ DREW
• Format: Patent
• Language: Chinese; English
• Published: 07.12.2021
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

A system for inspecting a surface of a specimen includes a normal incidence phase-shifted deflectometry (PSD) sensor including an imaging sensor, a beam splitter, and an imaging optic arranged between the imaging sensor and the beam splitter. The illumination source illuminates the specimen with a light pattern and is arranged perpendicular to the surface of the specimen. The imaging sensor captures the light pattern reflected from the surface of the specimen in a sensor image. The beam splitter directs a first portion of the light from the illumination source to the optical absorber, a second portion of the light from the illumination source to the surface of the specimen, and the light pattern reflected from the surface of the specimen to the imaging sensor. A data processing apparatus in communication with the normal incidence PSD sensor determines properties of the surface of the specimen based on the sensor image. 一种用于对样品的表面进行检查的系统，该系统包括正入射相移偏转测量（PSD）传感器，该传感器包括成像传感器、分束器以及被布置在成像传感器与分束器之间的成像光学器件。光照源采用光图案照射