Electrostatic chuck with multiple layers of electrodes

• Main Authors: ZHU SHUNCUN, ZHANG WEI, MA JUNFENG, HU DIE, ZHANG LIFANG
• Format: Patent
• Language: Chinese; English
• Published: 26.11.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention relates to an electrostatic chuck with multiple layers of electrodes, and belongs to the technical field of electrostatic chucks. The electrostatic chuck with the multiple layers of electrodes comprises a body, wherein a dielectric layer is arranged on the top part of the body, an electrode hole layer is arranged at the bottom part of the body, electrode holes are formed in the electrode hole layer, buffer layers are arranged between the dielectric layer and the electrode hole layer, first electrode layers are respectively arranged between the adjacent buffer layers and on the lower surface of the buffer layer located at the lowest part, a second electrode layer is arranged on the upper surface of the buffer layer located at the uppermost part, conductive holes are formed between the dielectric layer and the electrode hole layer, and the conductive holes are filled with conductive slurry. The electrostatic chuck has the advantages that multiple layers of electrodes which are conducted up and dow