High-purity arsine purification and collection device

• Main Authors: HOU XINGCHENG, SU YAOHUA, YU FENG, ZHANG CHE, REN SHAOKE
• Format: Patent
• Language: Chinese; English
• Published: 26.11.2021
• Subjects: PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEPARATION; TRANSPORTING

The invention discloses a high-purity arsine purification and collection device which comprises a rectifying tower kettle, a rectifying tower and a pipeline system, wherein the rectifying tower kettle is used for heating and evaporating liquid-phase arsine, and the rectifying tower kettle is provided with a heating circulator. The rectifying tower is used for condensing gas-phase arsine and provided with a condenser, and an inlet of the rectifying tower is communicated with an outlet of the rectifying tower kettle . The pipeline system is used for monitoring and collecting non-condensable steam containing arsine. Compared with the prior art, the arsine is purified by adopting the rectifying tower with a better separation effect, the arsine is further purified by arranging the terminal purifier and the filter on the pipeline system, and meanwhile, the arsine purity is monitored in real time by utilizing the online analyzer, so that the arsine crude product can be refined to a high-purity level, and the effect