Plasma processing device and magnetic conductive assembly and method thereof

The invention discloses a plasma processing device and a magnetic conductive assembly and method thereof. The device comprises a reaction cavity which comprises a reaction cavity side wall; a dielectric window which is positioned on the side wall of the reaction cavity; a coil which is positioned on...

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Bibliographic Details
Main Author YIN SHILIU
Format Patent
LanguageChinese
English
Published 19.11.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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