Processing system

• Main Authors: AMIKURA NORIHIKO, HIROSE JUN
• Format: Patent
• Language: Chinese; English
• Published: 02.11.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The operating time of a processing system is increased. The processing system includes a vacuum transfer module, a plurality of processing modules, a plurality of load-lock modules, and a plurality of atmospheric transfer modules. The vacuum transfer module is configured to transfer a substrate in a pressure lower than an atmospheric pressure. The processing modules are connected to the vacuum transfer module and configured to process the substrate. The load-lock modules are connected to the vacuum transfer module. Each of the atmospheric transfer modules configured to transfer the substrate in an atmospheric environment and is connected to at least one of the load-lock modules. 本发明增加处理系统的工作时间。处理系统包括真空输送组件、多个处理组件、多个负载锁定组件、多个大气输送组件。真空输送组件在比大气压低的压力气氛下输送基片。多个处理组件与真空输送组件连接，用于处理基片。多个负载锁定组件与真空输送组件连接。多个大气输送组件在大气压气氛下输送基片。另外，各大气输送组件与多个负载锁定组件的至少一个连接。