MICROMECHANICAL COMPONENT FOR A YAW RATE SENSOR AND CORRESPONDING PRODUCTION METHOD, AND YAW RATE SENSOR

• Main Authors: MARKISCH STEFFEN, BALSLINK THORSTEN, KUHLMANN NILS FELIX, MAUL ROBERT, KUEHNEL MATTHIAS, SCHEBEN ROLF, GEIGER WOLFRAM
• Format: Patent
• Language: Chinese; English
• Published: 29.10.2021
• Subjects: GYROSCOPIC INSTRUMENTS; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; NAVIGATION; PERFORMING OPERATIONS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; SURVEYING; TESTING; TRANSPORTING

A micromechanical component for a yaw rate sensor. The micromechanical component includes a substrate having a substrate surface (10), a first rotor mass (12a) developed in one piece, which is able to be set into a first torsional vibration (16a) about a first axis of rotation (18a) aligned perpendicular to the substrate surface (10), and at least one first component (22a, 22b, 38a and 38b) of the micromechanical component. The first rotor mass (12a) is connected to the at least one first component (22a, 22b, 38a and 38b) via at least one first spring element (26a). The at least one first spring element (26a) extends through a lateral concavity (28a) on the first rotor mass (12a) in each case and is connected to a recessed edge region of the first rotor mass (12a). A yaw rate sensor and a production method for a micromechanical component for a yaw rate sensor, are also described. 本发明涉及一种用于转速传感器的微机械构件，所述微机械构件具有带有衬底表面(10)的衬底、一件式的第一转子质量(12a)和微机械构件的至少一个第一部件(22a，22b，38a，38b)，所述第一转子质量能够被置于围绕垂直于衬底表面(10)定向的第一旋转轴线(18a