PARTICLE BEAM DEVICE AND COMPOSITE BEAM DEVICE

• Main Authors: NAGAHARA KOJI, MADOKORO YUICHI
• Format: Patent
• Language: Chinese; English
• Published: 12.10.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

The invention provides a particle beam apparatus and a composite beam apparatus. The particle beam device is capable of selectively and appropriately switching a charged particle beam and a neutral particle beam. A particle beam lens barrel (19) is provided with an ion source (41), a condenser (52), a charge exchange gate (55), and an objective lens (56). The ion source (41) generates ions. The condenser (52) switches the ion beam and the neutral beam as a particle beam to be irradiated onto the sample (S) by switching the focus of the ion beam. The charge exchange gate (55) converts the ion beam into a neutral particle beam by neutralizing at least a portion of the ion beam. The objective lens (56) is disposed on the downstream side of the charge exchange gate (55). When a sample (S) is irradiated with a neutral particle beam as a particle beam, the objective lens (56) reduces the ion beam toward the sample (S). 本发明提供粒子射束装置和复合射束装置，该粒子射束装置能够选择性地且适当地切换带电粒子射束和中性粒子射束。粒子射束镜筒(19)具备离子源(41)、聚光镜(52)、电荷交换栅极(55)和物镜(56)