ELECTRODE ASSEMBLIES FOR PLASMA DISCHARGE DEVICES

• Main Authors: GAMACHE YVES, LAMONTAGNE ANDRE
• Format: Patent
• Language: Chinese; English
• Published: 08.10.2021
• Subjects: ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS

There is provided a compound electrode assembly for generating a plasma in a plasma chamber of a plasma discharge device. The compound electrode assembly includes a casing, a discharge electrode and a sealing compound. The casing is made of a dielectric material and includes at least one side wall and an end wall defining a closed end. The discharge electrode is mounted in the casing and is bonded to the end wall. The sealing compound surrounds the discharge electrode and extends within the casing. 提供了一种用于在等离子体放电设备的等离子体室中产生等离子体的组合电极组件。组合电极组件包括壳体、放电电极和密封组合物。壳体由介质材料制成并且包括至少一个侧壁和限定封闭端部的端壁。放电电极安装在壳体内并结合到端壁。密封组合物围绕放电电极并在壳体内延伸。