RELAXOR FERROELECTRIC CAPACITORS AND METHODS OF FABRICATION

• Main Authors: GOSAVI TANAY, AVCI UYGAR, PENUMATCHA ASHISH VERMA, HARATIPOUR NAZILA, TUNG ING, CHANG SOUI, SUNG SEUNG HOON, YOUNG IAN, LIN CHIAING, KAVALIEROS JACK
• Format: Patent
• Language: Chinese; English
• Published: 28.09.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A capacitor device includes a first electrode having a first metal alloy or a metal oxide, a relaxor ferroelectric layer adjacent to the first electrode, where the ferroelectric layer includes oxygen and two or more of lead, barium, manganese, zirconium, titanium, iron, bismuth, strontium, neodymium, potassium, or niobium and a second electrode coupled with the relaxor ferroelectric layer, where the second electrode includes a second metal alloy or a second metal oxide. 电容器器件包括：具有第一金属合金或金属氧化物的第一电极；与第一电极相邻的弛豫铁电层，其中铁电层包括铅、钡、锰、锆、钛、铁、铋、锶、钕、钾或铌中的两种或更多种、以及氧；以及与弛豫铁电层耦合的第二电极，其中第二电极包括第二金属合金或第二金属氧化物。