Integrated bidirectional driving micropositioner and motion device

• Main Authors: JIANG XUCHU, PENG RENQIANG, YUAN JIAXIN
• Format: Patent
• Language: Chinese; English
• Published: 28.09.2021
• Subjects: BLASTING; ENGINEERING ELEMENTS AND UNITS; FRAMES, CASINGS, OR BEDS OF ENGINES OR OTHER MACHINES ORAPPARATUS NOT SPECIFIC TO AN ENGINE, MACHINE, OR APPARATUSPROVIDED FOR ELSEWHERE; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; LIGHTING; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; MECHANICAL ENGINEERING; PHYSICS; STANDS OR SUPPORTS; TESTING; THERMAL INSULATION IN GENERAL; WEAPONS

The invention belongs to the technical field of integrated circuit preparation, and particularly discloses an integrated bidirectional driving micropositioner and a motion device. The micropositioner includes a mounting base; a vertical base which is movably arranged on the mounting base in the Z direction, and the position of the vertical base in the Rz direction is unchanged relative to the mounting base; a rotating seat which can be rotatably arranged on the vertical base in a sleeved manner in the Rz direction, and the position of the rotating seat in the Z direction is unchanged relative to the vertical base; a bidirectional driving device which comprises a vertical motor assembly and a rotating motor assembly which are coaxial and arranged side by side in the Z direction; the vertical motor assembly and the rotating motor assembly are both coaxially arranged with the rotating base in a sleeved mode; the vertical motor assembly is used for driving the rotating base and the vertical base to move relative