Double-bandpass optical filter and manufacturing method thereof

• Main Authors: WANG YING, LU ZHANGWU, XU ZHENGCHI, LI GONGJIAN
• Format: Patent
• Language: Chinese; English
• Published: 24.09.2021
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention belongs to the technical field of optical thin films, and particularly relates to a double-bandpass optical filter and a manufacturing method thereof. The problems that an existing double-band-pass design film layer is irregular, the film layer effect is poor, products are prone to being bad and the like are solved. The double-band-pass optical filter comprises a substrate, a double-band-pass film system arranged on one side of the substrate and an AR film system arranged on the other side of the substrate, the double-band-pass film system comprises low-refractive-index film layers and high-refractive-index film layers which are alternately stacked from inside to outside, and the outermost layer of the low-refractive-index film layers; the film system structure of the double-band-pass film system is formed by mutually stacking two film stacks (0.5LH0.5L)13 and 1.5(0.5LH0.5L)10, the AR film system comprises low-refractive-index film layers, high-refractive-index film layers and the outermost laye