IMAGING SYSTEM AND METHOD USING PROJECTED REFERENCE TO GUIDE ADJUSTMENT OF CORRECTION OPTIC

• Main Author: CHAN MATTHEW
• Format: Patent
• Language: Chinese; English
• Published: 14.09.2021
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

System and method using a projected reference to guide adjustment of a correction optic. In an exemplary method, a reference may be projected onto an imaging detector by propagation of light generally along an optical axis that extends from the reference, through an objective, to a surface of a sample holder, and from the surface, back through the objective, to the imaging detector. The light may propagate through an off-axis aperture located upstream of the imaging detector and spaced from the optical axis. A plurality of images of the reference may be captured using the imaging detector, and with a correction optic at two or more different settings. A setting for the correction optic may be selected based on the plurality of images, and a sample may be imaged while the correction optic has the selected setting. 使用投影参照物来引导校正光学器件的调节的系统和方法。在示例性方法中，可以通过光大致沿光轴传播而将参照物投影到成像检测器上，该光轴从参照物通过物镜延伸到达样品保持器的表面，并且从该表面通过物镜返回延伸到成像检测器。光可以传播通过位于成像检测器上游并与光轴间隔开的离轴光圈。可以使用成像检测器并且利用校正光学器件在两个或更多个不同设置下捕获参照物的多个图像。可以基于多个图像选择用于校正光学器件的设置，