Method for determining gallium in gallium arsenide wafer production wastewater

The invention relates to a method for determining gallium in gallium arsenide wafer production wastewater. The method comprises the following steps of (1) establishing a standard curve, (2) adding 1+1 sulfuric acid into the gallium arsenide wafer production wastewater, slightly heating, then adding...

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Main Authors LIU JINGJING, LU JUNBING, DENG YONGHUAI, GAO ZHENGJIAO, QI BAIYU, ZHAO HECUN, YANG ZHUORONG, BIAN ZHENTAO, ZHAO KUN, LU CHANGXIANG, HOU XUE, WANG ZHUO
Format Patent
LanguageChinese
English
Published 14.09.2021
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Summary:The invention relates to a method for determining gallium in gallium arsenide wafer production wastewater. The method comprises the following steps of (1) establishing a standard curve, (2) adding 1+1 sulfuric acid into the gallium arsenide wafer production wastewater, slightly heating, then adding concentrated hydrochloric acid, evaporating to 20-30 mL at low temperature, then adding concentrated hydrochloric acid, repeatedly evaporating for 3-4 times until sulfur trioxide dense smoke is generated by evaporation and is nearly dry, then adding diluted hydrochloric acid to dissolve salts, and finally fixing the volume to obtain a test solution, (3) dropwise adding a titanium trichloride solution into the test solution until the test solution is purple, adding 4-6 excessive drops of the titanium trichloride solution after the test solution is stable, uniformly shaking, and standing for 10-15 minutes, (4) adding a rhodamine B solution into the solution obtained in the step (3), and uniformly shaking, adding a be
Bibliography:Application Number: CN202110520195