CHEMICALLY SENSITIVE SENSOR COMPRISING MICRO-BARRIER AND METHOD OF FABRICATION THEREOF

• Main Authors: HAICK HOSSAM, MILYUTIN YANA, ABUD HAWA MANAL, SHANI GIDI
• Format: Patent
• Language: Chinese; English
• Published: 10.09.2021
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The present invention relates to a chemically sensitive sensor for detecting volatile organic compounds, the sensor comprising a substrate, an electrode array, a micro-barrier, and a sensing layer comprising a multiplicity of core-shell particles in close-packed orientation, the particles comprising a metal nanoparticle (MNP) core and an organic ligand shell, wherein the MNP core has a mean particle size below about 15 nm. The invention further provides a method for fabrication of the chemically sensitive sensor. 本发明涉及一种用于检测挥发性有机化合物的化学敏感传感器，该传感器包括基底、电极阵列、微屏障和感测层，该感测层包括紧密排列取向的多重核-壳粒子，该粒子包括金属纳米粒子(MNP)核和有机配体壳，其中MNP核的平均粒度低于大约15nm。本发明还提供了一种制造化学敏感传感器的方法。