Method and system for measuring thickness of GRIN lens through spectral confocal method

• Main Authors: LIU JIHONG, QIAO LIN, LI CHUNYAN, LI GENGPENG
• Format: Patent
• Language: Chinese; English
• Published: 10.09.2021
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention provides a method and asystem for measuring the thickness of a GRIN lens through a spectral confocal method, and solves the problem that the thickness of the GRIN lens is not accurately measured through an existing method. In order to realize the thickness measurement of the radial GRIN lens based on the spectral confocal method, a radial GRIN lens thickness measurement model of the spectral confocal method is established according to the dispersion principle of the spectral confocal method in combination with the light propagation characteristics of the radial GRIN lens, and the difference value of focal positions in air on the upper surface and the lower surface of the lens is obtained based on the spectral confocal method. The thickness H of the radial GRIN lens is calculated by using the function relationship between the difference value h0 of the gradient refractive index and the focal position and the thickness H of the lens, thereby realizing the thickness measurement of the radial GRIN l