High-energy charged particle imaging device

• Main Authors: LI PENG, ZHANG PENG, WANG JIANXIN, XIAO DEXIN, WANG HANBIN, ZHOU ZHENG, LAO CHENGLONG, WU DAI, ZHOU KUI, CHEN LIJUN
• Format: Patent
• Language: Chinese; English
• Published: 31.08.2021
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The invention relates to a high-energy charged particle imaging device, and belongs to the technical field of charged particle imaging, wherein the high-energy charged particle imaging device sequentially comprises a particle source, a beam matching transmission section, a plasma imaging lens group and a detection system which share the same optical axis. The high-energy charged particle imaging system is composed of the particle source, the beam matching transmission section, the plasma imaging lens group and the detection system; the structure is simple and compact, the applicability of the high-energy charged particles is improved, and the application scene of the high-energy charged particles is enriched; and meanwhile the high gradient advantage of the plasma imaging lens is utilized, the high-order imaging error is reduced, the spatial resolution capability of the high-energy charged particle imaging device is improved, and the adjustment is convenient. 本发明涉及一种高能带电粒子成像装置，属于带电粒子成像技术领域，依次包括共光轴设置的粒子源、束流匹配传