UNSUPERVISED DEFECT SEGMENTATION

An inspection system may receive inspection datasets from a defect inspection system associated with inspection of one or more samples, wherein an inspection data set of the plurality of inspection datasets associated with a defect includes values of two or more signal attributes and values of one o...

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Bibliographic Details
Main Authors SOLTANMOHAMMADI ERFAN, JANI MOHIT, RAMAKRISHNAN ASHWIN
Format Patent
LanguageChinese
English
Published 13.08.2021
Subjects
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