UNSUPERVISED DEFECT SEGMENTATION
An inspection system may receive inspection datasets from a defect inspection system associated with inspection of one or more samples, wherein an inspection data set of the plurality of inspection datasets associated with a defect includes values of two or more signal attributes and values of one o...
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Main Authors | , , |
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Format | Patent |
Language | Chinese English |
Published |
13.08.2021
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Subjects | |
Online Access | Get full text |
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