UNSUPERVISED DEFECT SEGMENTATION

• Main Authors: SOLTANMOHAMMADI ERFAN, JANI MOHIT, RAMAKRISHNAN ASHWIN
• Format: Patent
• Language: Chinese; English
• Published: 13.08.2021
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

An inspection system may receive inspection datasets from a defect inspection system associated with inspection of one or more samples, wherein an inspection data set of the plurality of inspection datasets associated with a defect includes values of two or more signal attributes and values of one or more context attributes. An inspection system may further label each of the inspection datasets with a class label based on respective positions of each of the inspection datasets in a signal space defined by the two or more signal attributes, where each class label corresponds to a region of the signal space. An inspection system may further segment the inspection datasets into two or more defect groups by training a classifier with the values of the context attributes and corresponding class labels for the inspection datasets, where the two or more defect groups are identified based on the trained classifier. 本公开揭示一种检验系统，其可从缺陷检验系统接收与一或多个样品的检验相关联的检验数据集，其中与缺陷相关联的所述多个检验数据集的检验数据集包含两个或更多个信号属性的值及一或多个上下文属性的值。检验系统可进一步基