Sensor capacitance error evaluation method based on ANSYS software
The invention belongs to the technical field of sensors and computers, and particularly relates to a sensor capacitance error evaluation method based on ANSYS software. The method comprises the following steps: firstly, building a sensor simulation model, dividing grids, applying pressure loads, per...
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Main Authors | , |
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Format | Patent |
Language | Chinese English |
Published |
06.08.2021
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Subjects | |
Online Access | Get full text |
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Summary: | The invention belongs to the technical field of sensors and computers, and particularly relates to a sensor capacitance error evaluation method based on ANSYS software. The method comprises the following steps: firstly, building a sensor simulation model, dividing grids, applying pressure loads, performing static structural mechanical simulation, obtaining a center deflection simulation value W, and calculating a center deflection theoretical value W0; judging whether the center deflection error meets the requirement or not, and if not, optimizing the grid quality continuesly; calculating a capacitance simulation value C by adopting an infinitesimal capacitance discretization method, and calculating a capacitance theoretical value C0; comparing the capacitance theoretical value C0 with the simulation value C, judging whether the capacitance error meets the requirement or not, and if yes, ending error evaluation; if not, continuing to judge whether the simulation capacitance error can meet the requirement or n |
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Bibliography: | Application Number: CN202110533188 |