Sensor capacitance error evaluation method based on ANSYS software

• Main Authors: YANG RONGSEN, DU YULING
• Format: Patent
• Language: Chinese; English
• Published: 06.08.2021
• Subjects: CALCULATING; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; PHYSICS

The invention belongs to the technical field of sensors and computers, and particularly relates to a sensor capacitance error evaluation method based on ANSYS software. The method comprises the following steps: firstly, building a sensor simulation model, dividing grids, applying pressure loads, performing static structural mechanical simulation, obtaining a center deflection simulation value W, and calculating a center deflection theoretical value W0; judging whether the center deflection error meets the requirement or not, and if not, optimizing the grid quality continuesly; calculating a capacitance simulation value C by adopting an infinitesimal capacitance discretization method, and calculating a capacitance theoretical value C0; comparing the capacitance theoretical value C0 with the simulation value C, judging whether the capacitance error meets the requirement or not, and if yes, ending error evaluation; if not, continuing to judge whether the simulation capacitance error can meet the requirement or n