NOISE CORRECTION FOR ALIGNMENT SIGNAL

• Main Authors: ANDERSSON GREGER GOTE, SHOME KRISHANU, AARTS IGOR MATHEUS PETRONELLA, DASTOURI ZAHRASADAT
• Format: Patent
• Language: Chinese; English
• Published: 30.07.2021
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

A method of applying a measurement correction includes determining an orthogonal subspace used to characterize the measurement as a plot of data. A first axis of the orthogonal subspace corresponds to constructive interference output from an interferometer of the metrology system plus a first error variable and a second axis of the orthogonal subspace corresponds to destructive interference output from the interferometer of the metrology system plus a second error variable. The method also includes determining a slope of the plot of data and determining a fitted line to the plot of data in the orthogonal subspace based on the slope. 一种应用测量校正的方法，包括确定正交子空间，正交子空间被用于将测量表征为数据图。正交子空间的第一轴线对应于来自量测系统的干涉仪的相长干涉输出加上第一误差变量，并且正交子空间的第二轴线对应于来自量测系统的干涉仪的相消干涉输出加上第二误差变量。方法还包括确定数据图的斜率，并且基于斜率来确定正交子空间中的数据图的拟合线。