Interferometer integrated mirror and system based on MEMS micromirror

The invention discloses an interferometer integrated mirror and system based on an MEMS micromirror, and is suitable for a compact FTIR spectral measurement system. Based on the Michelson interference principle, the MEMS micromirror and a traditional interference system are integrated, the system si...

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Bibliographic Details
Main Authors WAN HAOWEI, CHEN YAN, TAN XIAOCHAO, YI FEI
Format Patent
LanguageChinese
English
Published 23.07.2021
Subjects
COLORIMETRY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
RADIATION PYROMETRY
TESTING
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Summary:The invention discloses an interferometer integrated mirror and system based on an MEMS micromirror, and is suitable for a compact FTIR spectral measurement system. Based on the Michelson interference principle, the MEMS micromirror and a traditional interference system are integrated, the system size is reduced, the installation and adjustment error is simplified, and the stability is improved. The interference integrated mirror is designed to be of a symmetrical structure, the influence of thermal deformation caused by temperature changes on interference is reduced, and the interferometer integrated mirror is not sensitive to assembly errors of other optical elements of the system. The interference integrated mirror is different from a traditional Michelson interferometer, a fixed mirror is omitted, light reflected by the front surface and the rear surface of the MEMS micromirror is interfered, and the optical path difference between light beams is amplified, so that the spectral resolution is improved, and
Bibliography:Application Number: CN202110386548