Liquid supply system

• Main Authors: ZHANG YUZHENG, LI SHANGSHENG, XU ZHENYI, LIN ZIYANG, WU CHENGHAN, ZENG GUOSHU, LIU ZHENYU
• Format: Patent
• Language: Chinese; English
• Published: 16.07.2021
• Subjects: ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; CONVEYING; HANDLING THIN OR FILAMENTARY MATERIAL; PACKAGES; PACKAGING ELEMENTS; PACKING; PERFORMING OPERATIONS; STORING; TRANSPORTING

The present invention relates to a liquid supply system. A photolithography includes a storage tank storing a process chemical fluid, an anti-collision frame, and an integrated sensor assembly. The storage tank includes a dispensing opening located at the lowermost portion of the storage tank in the gravity direction. The anti-collision frame is connected to the storage tank. The integrated sensor assembly is disposed on at least one of the collision avoidance frame and the storage tank to measure a change in fluid quality in response to the fluid quality measurement. 一种液体供应系统，微影技术包含储存制程化学流体的储存槽、防撞框架以及集成感测器组件。储存槽包含位于储存槽在重力方向上的最下部分的分配口。防撞框架连接至储存槽。集成感测器组件设置在防撞框架以及储存槽的至少一个上，以测量因应流体品质测量的流体品质的变化。