System and Method for Testing Semiconductor

• Main Author: KIM GYUNG-JIN
• Format: Patent
• Language: Chinese; English
• Published: 13.07.2021
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

A system for testing a semiconductor may include a transfer chamber, at least one loadlock chamber and at least one test chamber. The transfer chamber may include a plurality of sidewalls. The loadlock chamber may be arranged on a first sidewall of the sidewalls of the transfer chamber. The loadlock chamber may include a carrier configured to receive a plurality of wafers. The test chamber may be arranged on a second sidewall of the sidewalls of the transfer chamber. When the transfer chamber is connected to the loadlock chamber, a pressure of the transfer chamber may be changed into a pressure of the loadlock chamber. When the transfer chamber is connected to the test chamber, the pressure of the transfer chamber may be changed into a pressure of the test chamber. 一种用于测试半导体的系统可以包括：传递室、至少一个装载锁定室和至少一个测试室。传递室可以包括多个侧壁。装载锁定室可以布置在传递室的多个侧壁的第一侧壁上。装载锁定室可以包括被配置为接收多个晶片的载具。测试室可以布置在传递室的多个侧壁的第二侧壁上。当传递室连接到装载锁定室时，传递室的压力可以改变为装载锁定室的压力。当传递室连接到测试室时，传递室的压力可以改变为测试室的压力。