Integrated circuit, photodetector, and method of forming integrated circuit

• Main Authors: HONG CAIHAO, CHEN YINGXUN, LIU TAOCHENG
• Format: Patent
• Language: Chinese; English
• Published: 29.06.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention discloses an integrated circuit, a photodetector and a method for forming the integrated circuit. The integrated circuit comprises the photodetector. The photodetector includes a circular grating formed in an annular trench in a semiconductor substrate. The circular grating includes a...