Integrated circuit, photodetector, and method of forming integrated circuit

• Main Authors: HONG CAIHAO, CHEN YINGXUN, LIU TAOCHENG
• Format: Patent
• Language: Chinese; English
• Published: 29.06.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention discloses an integrated circuit, a photodetector and a method for forming the integrated circuit. The integrated circuit comprises the photodetector. The photodetector includes a circular grating formed in an annular trench in a semiconductor substrate. The circular grating includes a plurality of dielectric fins and a plurality of photosensitive fins positioned in the annular trench. The circular grating is configured to receive incident light and direct the incident light around the annular trench through the plurality of dielectric fins and the plurality of photosensitive fins until the light is absorbed by one of the plurality of photosensitive fins. 一种集成电路、光电侦测器以及形成集成电路的方法，集成电路包括光电侦测器。光电侦测器包括圆形光栅，此光栅形成在半导体基板中的环形沟槽中。圆形光栅包括定位在环形沟槽中的多个介电鳍片及多个光敏鳍片。圆形光栅配置用以接收入射光，并引导入射光围绕环形沟槽穿过多个介电鳍片及多个光敏鳍片，直至光被多个光敏鳍片中的一者吸收为止。