METHOD FOR MANUFACTURING COMB-TOOTHED ELEMENT

• Main Authors: HONMA HIROAKI, MITSUYA HIROYUKI, TOSHIYOSHI HIROSHI
• Format: Patent
• Language: Chinese; English
• Published: 22.06.2021
• Subjects: CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TRANSPORTING

Disclosed is a method for manufacturing a comb-toothed element that comprises a plurality of fixed comb teeth and a plurality of movable comb teeth positioned so as to mesh with one another with a gap interposed therebetween, the amount of meshing of said movable comb teeth with regard to said fixed comb teeth being variable, wherein first mask patterns for forming the fixed comb teeth and second mask patterns for forming the movable comb teeth are formed on a surface of a substrate to be etched, a mask pattern to be etched is formed, said mask pattern to be etched being positioned on the substrate to be etched between neighboring first mask patterns and between neighboring second mask patterns, and having a thickness in accordance with a first gap dimension between fixed comb teeth and movable comb teeth that are neighboring, and in accordance with a second gap dimension between fixed comb teeth that are neighboring one another, and the substrate to be etched and the mask pattern to be etched are etched usin