Electrostatic chuck and substrate fixing device

• Main Author: KUSAMA YASUHIKO
• Format: Patent
• Language: Chinese; English
• Published: 11.06.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The disclosure provides an electrostatic chuck and a substrate fixing device. A positive electrode and a negative electrode face each other with a first gap around a gas hole, face each other with a first path and a second path with the gas hole being interposed therebetween, and face each other with a second gap around the gas hole. The first path and the second path converge to be the first gap at a first end, and converge to be the second gap at a second end. At the first end and the second end, corner portions formed by the positive electrode and the negative electrode are rounded. A first distance between the gas hole and the positive electrode is constant in the first path except the corner portions. A second distance between the gas hole and the negative electrode is constant in the second path except the corner portions. The first distance and the second distance are the same. 本公开提供一种静电吸盘和基板固定装置，其中，正电极和负电极在气孔附近隔着第一间隙彼此面对，正电极和负电极隔着第一路径和第二路径彼此面对，气孔介于第一路径和第二路径之间，并且正电极和负电极在气孔附近隔着第二间隙彼此面对。第一路径和第二路径在第一端处会聚成