Ion trap mass analyzer and manufacturing method thereof

• Main Authors: HE QIANYING, GU BINGYAN, BAO JINGWEI, ZHANG JUNLIANG, ZHANG TENGYU, WU HUANMING
• Format: Patent
• Language: Chinese; English
• Published: 11.06.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

The invention discloses an ion trap mass analyzer and a manufacturing method thereof. The ion trap mass analyzer is characterized in that a three-dimensional structure with a central symmetry axis is manufactured on a multi-layer printed circuit board, each layer of the multi-layer printed circuit board is perpendicular to the central symmetry axis, the multi-layer printed circuit board comprises a plurality of conductive layers, each conductive layer is used as an electrode, the conductive layer on the outermost side serves as a shielding electrode and is used for shielding an external electric field, the conductive layer on the secondary outer side serves as an end cover electrode, the conductive layers in the middle are connected through a metal coating parallel to the central symmetry axis to serve as ring electrodes, and the shielding electrode, the end cover electrode, the ring electrode, the end cover electrode and the shielding electrode are sequentially arranged from top to bottom along the central s