METHOD AND SYSTEM FOR DETERMINING THE SEPARATION DISTANCE BETWEEN A BODY AND THE SURFACE OF AN OBJECT BY MEANS OF LOW COHERENCE OPTICAL INTERFEROMETRY TECHNIQUES UNDER DISTORTION DUE TO SUB-SAMPLING

• Main Authors: DONADELLO SIMONE, PREVITALI BARBARA, COLOMBO DANIELE
• Format: Patent
• Language: Chinese; English
• Published: 08.06.2021
• Subjects: CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; MACHINE TOOLS; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; PHYSICS; SOLDERING OR UNSOLDERING; TESTING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

A method and a system are described for determining the separation distance between an object or a material and a processing tool or an instrument for measuring the object or material, comprising:- generating a measurement low coherence optical radiation beam, leading the measurement beam towards the object and leading the reflected or diffused measurement beam from the object towards an optical interferometric sensor arrangement in a first direction of incidence,- generating a reference low coherence optical radiation beam, and leading the reference beam towards the optical interferometric sensor means in a second direction of incidence at a preset angle of incidence with respect to the first direction of incidence of the measurement beam;- superimposing the measurement beam and the reference beam on a common region of incidence of the sensor means;- detecting the position of a pattern of interference fringes between the measurement beam and the reference beam on the region of incidence; and- determining a d