METHODS FOR GENERATING CHARACTERISTIC PATTERN AND TRAINING MACHINE LEARNING MODEL

A method of generating a characteristic pattern for a patterning process and training a machine learning model. The method for generating the characteristic pattern includes obtaining a trained generator model configured to generate a characteristic pattern (e.g., hot spot pattern), and an input pat...

Full description

Saved in:
Bibliographic Details
Main Authors SIMMONS MARK C, LIN CHENXI, WUU JEN-YI
Format Patent
LanguageChinese
English
Published 01.06.2021
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
Online AccessGet full text

Cover

More Information
Summary:A method of generating a characteristic pattern for a patterning process and training a machine learning model. The method for generating the characteristic pattern includes obtaining a trained generator model configured to generate a characteristic pattern (e.g., hot spot pattern), and an input pattern; and generating, via simulation of the trained generator model (e.g., CNN), the characteristic pattern based on the input pattern, wherein the input pattern is at least one of a random vector, a class of pattern. 一种生成用于图案化过程的特征图案和训练机器学习模型的方法。用于生成特征图案的方法包括：获得经训练的生成器模型和输入图案，该经训练的生成器模型被配置为生成特征图案(例如热点图案)；以及经由经训练的生成器模型(例如CNN)的模拟，基于输入图案生成特征图案，其中，输入图案是随机向量、一种类型图案中的至少一者。
Bibliography:Application Number: CN20198068610