Method and system for treating byproducts in silicon nitride powder production process

• Main Authors: ZENG YUANJIANG, WANG DONGGUO, HUANG BIN, BAO QUANXING, PAN XIAOLONG, ZHANG JIWU
• Format: Patent
• Language: Chinese; English
• Published: 14.05.2021
• Subjects: AMMONIA; CHEMISTRY; COMPOUNDS THEREOF; CYANOGEN; INORGANIC CHEMISTRY; METALLURGY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEPARATION; TRANSPORTING

The invention provides a method and a system for treating byproducts in a silicon nitride powder production process. The method comprises the following steps of forming a preset number of small holes in a smoke exhaust pipeline connected with a silicon nitride powder production reactor, sucking ammonia gas and hydrogen chloride gas generated by the silicon nitride powder production reactor into the smoke exhaust pipeline by using the induced draft fan, and filling air at room temperature into the smoke exhaust pipeline through the small holes in the smoke exhaust pipeline to be mixed with the ammonia gas and the hydrogen chloride gas, so that the mixed gas is cooled, and filtering and collecting ammonium chloride crystals generated by reaction of ammonia gas and hydrogen chloride in the mixed gas by using a dust remover connected with the smoke exhaust pipeline. According to the treatment method and system, produced silicon nitride powder and ammonium chloride can be effectively separated to obtain the silico