Film thickness measurement glass plate support and method

• Main Authors: ZHI QIDONG, HUANG BIN, QIAN CHAO, YU YANG
• Format: Patent
• Language: Chinese; English
• Published: 04.05.2021
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention belongs to the technical field of film thickness measurement, and particularly relates to a film thickness measurement glass plate support and method. The film thickness measurement glass plate support comprises a support frame, the upper end of the support frame is provided with a plurality of groups of caulking grooves, the bottom of one caulking groove is provided with a plurality of threaded holes, the threaded holes penetrate through the whole support frame, and the threaded holes are internally in threaded connection with bolts. The support has the advantages that the film thickness can be monitored and corrected in real time, a vacuum cavity is not damaged, the problems that the vacuum cavity is polluted, the vacuum environment is damaged, process stability is influenced and so on due to repeated entering and exiting of the vacuum cavity or vacuum breaking of the vacuum cavity are solved, time is saved, cost is reduced, and production efficiency is improved. 本发明属于膜厚测量技术领域，尤其是涉及一种膜厚测量玻璃板支架