Holder and charged particle beam device

• Main Author: HOSOYA KOTARO
• Format: Patent
• Language: Chinese; English
• Published: 20.04.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

The invention provides a holder capable of obtaining a bright field image or a dark field image of a sample to be observed with high precision. The holder (HL) has an upper member (HLt), a side member (HLs), and a bottom member (HLb). The upper member (HLt) has a hole (TH1) through which the charged particle beam passes, and a sample can be mounted in the hole (TH1). The bottom member (HLb) is provided so as to overlap the upper member (HLt) in plan view. The side member (HLs) is connected to a part of the upper member (HLt) and a part of the bottom member (HLb), so that the upper member (HLt) and the bottom member (HLb) are separated from each other in a cross-sectional view. The opening (OP) is a region surrounded by the upper member (HLt), the side member (HLs), and the bottom member (HLb), and a scintillator (SC1) is provided in the opening (OP). 本发明提供可高精度地得到成为观察对象的试样的亮视场像或暗视场像的保持件。保持件(HL)具有上部件(HLt)、侧部件(HLs)以及底部件(HLb)。上部件(HLt)具有用于使带电粒子束穿过的孔(TH1)，而且能够在孔(TH1)内搭载试样。底部件(HLb)设置成与上部件(HLt)在俯视下重叠。侧部件(HLs)以使上部件(HL