MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT

The invention relates to a micromechanical component, comprising: a retainer (10); a movable part (12); a first serpentine spring (16a); and a second serpentine spring (16b), which is mirror-symmetrical to the first serpentine spring (16a) with respect to a first plane of symmetry (18), wherein: a f...

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Bibliographic Details
Main Authors SCHARY TIMO, MIHALJEVIC JOSIP, RIEDRICH-MOELLER JANINE, SCHATZ FRANK, BOESSENDOERFER RALF, MUCHOW JOERG, EBERSPAECHER ALEXANDER, DOESSEL KERRIN
Format Patent
LanguageChinese
English
Published 20.04.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:The invention relates to a micromechanical component, comprising: a retainer (10); a movable part (12); a first serpentine spring (16a); and a second serpentine spring (16b), which is mirror-symmetrical to the first serpentine spring (16a) with respect to a first plane of symmetry (18), wherein: a first actuating device (24a) and a second actuating device (24b) are designed in such a way that, by means of the first actuating device (24a) and the second actuating device (24b), periodic deformations of the first serpentine spring (16a) and of the second serpentine spring (16b) can be induced, which deformations are mirror-symmetrical with respect to the first plane of symmetry (18); the micromechanical component further comprises a first torsion spring (26a) and a second torsion spring (26b), which each extend along an axis of rotation (32); and the movable part (12) can be moved relative to the retainer (10) about the axis of rotation (32) by means of at least the periodic and mirror-symmetrical deformations o
Bibliography:Application Number: CN201980059926